• Horizontal Rotating Trays with Planetary Running


• Electron Beam Gun Evaporation


• Resistive Heating


• Plasma Assisted Deposition


• Ion-Beam Assisted Deposition (IAD)


• Optical and Quartz Crystal Thickness Monitor


• Effective Dameter of Vacuum Chamber：ψ1300mm


• Vacuum Pressure：1×10^-6 torr